This product is an interferometer laser head based on a Class II HE-NE laser, featuring real-time data display for intuitive monitoring of product status. 


It also offers full compatibility with general-purpose laser heads (HP series) and enables integrated data management via a server when applied to various production facilities.

FEATURES

• Real-time monitoring of power & frequency

• Real-time monitoring of life-time

• Real-time monitoring of laser head status (stable, unstable)

• Error occurrence time tracking available

• Compatible with HP Laser general-purpose products

• Mirroring function available

• Data monitoring function using FDC available

• Applicable equipment: ASML, NIKON, HITACHI, AMAT

SPECIFICATIONS


APPLICABLE EQUIPMENTPOWERFREQUENCY BEAM SIZE
PINOVA BNikon i11D / AMAT Compass500 ㎼1.9~2.4 MHz 6mm
PINOVA CNikon SF / i12D / AMAT Compass500 ㎼ 2.4~3.0 MHz 3, 6, 9mm
PINOVA DNikon SF / ASML PAS / Cannon MPA5500180 ㎼ 3.4~4.0 MHz 6, 9mm
PINOVA DLNikon SF / ASML PAS80 ㎼ 4.4~5.0 MHz 6, 9mm
PINOVA ELNIKON S207 / S307
65 ㎼>5.8 MHz 6mm
PINOVA ZHitachi CD-SEM500 ㎼ 2.2~2.4 MHz 6mm

INSTALLATION CASES

MIRRORING INSTALLATION CASES

MONITORING USE CASES  MAX 20EA

PHOTICSNOVATECHNICS Co., Ltd. (PNT)     

CEO Kim Young-tae    TEL 031-8060-8804    

E-MAIL ehcho@pntsyst.co.kr

BUSINESS REGISTRATION NUMBER 561-88-00497    

HEAD OFFICE #811–814, Ace Dongbaek Tower Bldg. 1, 16-4 Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Korea    

R&D CENTER #205–207, Ace Dongbaek Tower Bldg. 1, 16-4 Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Korea


COPYRIGHTS © 2026 PHOTICSNOVATECHNICS. ALL RIGHTS RESERVED.

Photics Nova Technics Inc. (PNT)     CEO Kim Young-tae     TEL 031-8060-8804     E-MAIL ehcho@pntsyst.co.kr     
BUSINESS REGISTRATION NUMBER 561-88-00497
HEAD OFFICE #811–814, Ace Dongbaek Tower Bldg. 1, 16-4 Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Korea      

R&D CENTER #205–207, Ace Dongbaek Tower Bldg. 1, 16-4 Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Korea 


COPYRIGHTS © 2026 PHOTICSNOVATECHNICS. ALL RIGHTS RESERVED.