This is an inspection and measurement device designed to prevent scratches and damage to 12-inch wafers transferred from the ATM robot to the wafer carrier (FOUP).
It allows separate selection of wafer or blade to detect changes during wafer transfer and measure environmental variations such as minute changes in the blade, providing real-time data.
• Verification of human errors by tool users
• Detection of abnormal changes in ATM robot and Load Port during periodic measurement (PM)
• Prevention of wafer damage incidents
• ATM robot blade vibration detect.
• ATM robot blade leveling detect.
• Load Port moving vibration detect.
• Load Port moving plate leveling detect.
• Detection of micro vibrations during wafer pick / place
• Measurement of robot wafer centering
| APPLICABLE | ATM Robot Blade & Wafer (Vacuum, Cilp all type) |
| METHOD | Wafer Transfer Act (Pick_Place) |
| MEASURING TIME | ≤ 5 MIN (PER LOAD PORT) |
| REPETITIVE ACCURACY | 100 ㎛ |
| RESOLUTION(分解能) | 5 ㎛ |
| TARGET WAFER | 12 inch (300mm) SI, GAN ETC, ALL TYPE OF WAFER |
| OS | Windows 10 |
| DIMENSION | 458 X 350 X 332 mm (COMPATIBLE WITH NORMAL FOUP) |
| WEIGHT | ≤ 11 KG |
| POWER CHARAGE | BY WIRE (50 ~ 60 HZ / AC 200 ~ V) |
• WAFER SCRATCH caused by CRA FORK
• SCRATCH caused by insufficient WAFER MARGIN at FORK bottom
• TEACHING JIG error
• Work deviation and errors between operators
• ROBOT TEACHING enabled through data analysis
• Adjustment of equipment TEACHING values before RUNNING
• MANUAL MONITORING → AUTO MONITORING SYSTEM
• Improved productivity by applying to RUNNING equipment
• ASML_YIELDSTAR
• TEL_LITHUS
• KLA_ARCHER
• AMAT_ENDURA
• TEL_ACT13
USE CASE (KLA_ARCHER OVERLAY)
PHOTICSNOVATECHNICS Co., Ltd. (PNT)
CEO Kim Young-tae TEL 031-8060-8804
E-MAIL ehcho@pntsyst.co.kr
BUSINESS REGISTRATION NUMBER 561-88-00497
HEAD OFFICE #811–814, Ace Dongbaek Tower Bldg. 1, 16-4 Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Korea
R&D CENTER #205–207, Ace Dongbaek Tower Bldg. 1, 16-4 Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Korea
COPYRIGHTS © 2026 PHOTICSNOVATECHNICS. ALL RIGHTS RESERVED.
Photics Nova Technics Inc. (PNT) CEO Kim Young-tae TEL 031-8060-8804 E-MAIL ehcho@pntsyst.co.kr
BUSINESS REGISTRATION NUMBER 561-88-00497
HEAD OFFICE #811–814, Ace Dongbaek Tower Bldg. 1, 16-4 Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Korea
R&D CENTER #205–207, Ace Dongbaek Tower Bldg. 1, 16-4 Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Korea
COPYRIGHTS © 2026 PHOTICSNOVATECHNICS. ALL RIGHTS RESERVED.
